Photoluminescence and Raman spectroscopy in porous SiC
نویسندگان
چکیده
This paper presents results of porous Sic characterization using photoluminescence, Raman scattering and Atomic Force Microscopy. A comparative optical spectroscopy study on bulk Sic and porous Sic layers has shown a number of new features specific to nano-crystallite materials. The role of these effects on optical spectroscopy data in porous Sic accessed by photoluminescence and Raman scattering is discussed. O 2005 Elsevier Ltd. Al1 rights reserved.
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ورودعنوان ژورنال:
- Microelectronics Journal
دوره 36 شماره
صفحات -
تاریخ انتشار 2005